The thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass-spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role of atomic hydrogen in processes of decomposition and growth of metallic islands was determined by comparing with these processes under vacuum.

indium phosphide, atomic hydrogen, thermal decomposition, scanning electron microscopy, фосфід індію, атомарний водень, термічна декомпозиція, скануюча електрона мікроскопія